Invention Grant
US07880215B2 Nonvolatile semiconductor storage unit and production method therefor
有权
非易失性半导体存储单元及其制造方法
- Patent Title: Nonvolatile semiconductor storage unit and production method therefor
- Patent Title (中): 非易失性半导体存储单元及其制造方法
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Application No.: US11667736Application Date: 2005-11-16
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Publication No.: US07880215B2Publication Date: 2011-02-01
- Inventor: Hirohito Watanabe , Motofumi Saitou , Hiroshi Sunamura
- Applicant: Hirohito Watanabe , Motofumi Saitou , Hiroshi Sunamura
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2004-331320 20041116
- International Application: PCT/JP2005/021047 WO 20051116
- International Announcement: WO2006/054605 WO 20060526
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/788

Abstract:
A diffusion layer (102) is formed in the surface region of a semiconductor substrate (101). A control gate electrode (103) is formed on the substrate. An interlayer dielectric film (108) covers the entire surface of the substrate. A drain leader line (104) made of a semiconductor such as n-type polysilicon is led from the drain region, and a source leader line (107) is led from the source region through the interlayer dielectric film. The drain leader line is surrounded by an annular floating gate (105). In erase, for example, the control gate is set to a ground potential, and a positive voltage is applied to the drain leader line to remove electrons in the floating gate to the drain leader line. In write, positive voltages are applied to the control gate electrode and drain leader line to generate CHE and inject hot electrons into the floating gate. This allows to thin the gate insulating film of a flash memory, increase the degree of integration of a nonvolatile memory, and lower the driving voltage.
Public/Granted literature
- US20080144377A1 Nonvolatile Semiconductor Storage Unit and Production Method Therefor Public/Granted day:2008-06-19
Information query
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