Invention Grant
- Patent Title: Semiconductor device and fabrication method therefor
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US11478537Application Date: 2006-06-28
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Publication No.: US07880218B2Publication Date: 2011-02-01
- Inventor: Masaya Hosaka
- Applicant: Masaya Hosaka
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion LLC
- Current Assignee: Spansion LLC
- Current Assignee Address: US CA Sunnyvale
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
There is provided a semiconductor device including bit lines (14) formed in a semiconductor substrate (10), insulating film lines (18) located on the bit lines (14) to successively run in a length direction of the bit lines (14), gate electrodes (16) located above the semiconductor substrate (10) between the bit lines (14), and word lines (20) located on the gate electrodes (16) to run in a width direction of the bit lines (14), a trench region (22) formed between the bit lines (14) and the between word lines (20) in the semiconductor substrate, and there is also provided a fabrication method therefor. According to the present invention, it is possible to provide a semiconductor device where elements can be isolated between the word lines (14) and memory cells can be miniaturized, and to provide a fabrication method therefor.
Public/Granted literature
- US20060291262A1 Semiconductor device and fabrication method therefor Public/Granted day:2006-12-28
Information query
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