Invention Grant
US07880233B2 Transistor with raised source and drain formed on SOI substrate
有权
在SOI衬底上形成具有升高的源极和漏极的晶体管
- Patent Title: Transistor with raised source and drain formed on SOI substrate
- Patent Title (中): 在SOI衬底上形成具有升高的源极和漏极的晶体管
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Application No.: US12579444Application Date: 2009-10-15
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Publication No.: US07880233B2Publication Date: 2011-02-01
- Inventor: Jeong Ho Park
- Applicant: Jeong Ho Park
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2005-0133430 20051229
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
Embodiments relate to a method for fabricating a transistor by using a SOI wafer. A gate insulation layer and a first gate conductive layer on a silicon-on-insulator substrate of a substrate to form a first gate conductive pattern, a gate insulation layer pattern, and a silicon layer pattern. A device isolation insulation layer exposing the top surface of the first gate conductive layer pattern may be formed. A second gate conductive layer may be formed. A mask pattern may be formed. Then, a gate may be formed by etching. After forming a source and drain conductive layer on the silicon layer pattern, the mask pattern may be removed. A salicide layer may be selectively contacting the gate and the source and drain conductive layer may be formed.
Public/Granted literature
- US20100090279A1 METHOD FOR FABRICATING A TRANSISTOR USING A SOI WAFER Public/Granted day:2010-04-15
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