Invention Grant
US07880244B2 Wafer level CSP sensor 有权
晶圆级CSP传感器

Wafer level CSP sensor
Abstract:
An electronics package has a wafer level chip scale package (WLCSP) die substrate containing electronic circuits. Through-silicon vias through the die substrate electrically connect the electronic circuits to the bottom surface of the die substrate. A package sensor is coupled to the die substrate for sensing an environmental parameter. A protective encapsulant layer covers the top surface of the die substrate. A sensor aperture over the package sensor provides access for the package sensor to the environmental parameter.
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