Semiconductor devices including through-wafer interconnects are disclosed. According to an embodiment of the present invention, a semiconductor device may comprise a substrate having a first surface and a second, opposing surface, and a through-wafer interconnect extending into the first surface of the substrate. The through-wafer interconnect may include an electrically conductive material extending from the first surface of the substrate to the second, opposing surface of the substrate. The through-wafer interconnect may also include a first dielectric material disposed between the electrically conductive material and the substrate and extending from the second, opposing surface of the substrate to the first portion of the conductive material. Additionally, the through-wafer interconnect may include a second dielectric material disposed over a portion of the electrically conductive material and exhibiting a surface that defines a blind aperture extending from the first surface toward the second, opposing surface.