Invention Grant
US07880403B2 Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge
有权
在辉光放电装置中检测电弧的方法和用于控制高频电弧放电的装置
- Patent Title: Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge
- Patent Title (中): 在辉光放电装置中检测电弧的方法和用于控制高频电弧放电的装置
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Application No.: US12620163Application Date: 2009-11-17
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Publication No.: US07880403B2Publication Date: 2011-02-01
- Inventor: Noboru Kuriyama
- Applicant: Noboru Kuriyama
- Applicant Address: JP Kanagawa
- Assignee: Shibaura Mechatronics Corporation
- Current Assignee: Shibaura Mechatronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Volpe and Koenig, P.C.
- Priority: JP2001-323977 20011022
- Main IPC: H05B37/02
- IPC: H05B37/02 ; H05B41/16
Abstract:
In a method of detecting arc discharge in a glow-discharge apparatus GD that has a high-frequency power source PS, a cutting pulse is output for time T1 to the high-frequency power source PS to stop a supply of power to the glow-discharge apparatus GD, when dVr/dt-dVf/dt increases over a first level, where Vf and Vr are a traveling-wave voltage and a reflected-wave voltage applied to the glow-discharge apparatus GD, respectively. Arc discharge is determined to have developed in the glow-discharge apparatus, when Vr/Vf increases to a second level or a higher level within a preset time To after the supply of power to the glow-discharge apparatus is stopped
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