Invention Grant
US07880485B2 High-sensitive resistance measuring device and monitoring method of solder bump 失效
高灵敏度电阻测量装置和焊料凸块的监测方法

  • Patent Title: High-sensitive resistance measuring device and monitoring method of solder bump
  • Patent Title (中): 高灵敏度电阻测量装置和焊料凸块的监测方法
  • Application No.: US12116399
    Application Date: 2008-05-07
  • Publication No.: US07880485B2
    Publication Date: 2011-02-01
  • Inventor: Naoaki Nakamura
  • Applicant: Naoaki Nakamura
  • Applicant Address: JP Kawasaki
  • Assignee: Fujitsu Limited
  • Current Assignee: Fujitsu Limited
  • Current Assignee Address: JP Kawasaki
  • Agency: Staas & Halsey LLP
  • Priority: JP2007-219993 20070827
  • Main IPC: G01R27/08
  • IPC: G01R27/08
High-sensitive resistance measuring device and monitoring method of solder bump
Abstract:
According to an aspect of an embodiment, a high-sensitive resistance measuring device of solder bumps comprises a resistance variation detection unit which detects a differential voltage (ΔV=V1−V2), which is obtained by subtracting a second voltage (V2) generated in a reference bump connection unit by a constant current (I) from a second constant current source from a first voltage (V1) generated in a monitored bump connection unit by the constant current I from a first constant current source, as a resistance variation voltage representing a resistance variation (ΔR) of the monitored bump connection unit.
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