Invention Grant
- Patent Title: MEMS michelson interferometer and method of fabrication
- Patent Title (中): MEMS michelson干涉仪及其制作方法
-
Application No.: US11966586Application Date: 2007-12-28
-
Publication No.: US07880890B2Publication Date: 2011-02-01
- Inventor: David Reyes , E. Robert Schildkraut , Jinhong Kim
- Applicant: David Reyes , E. Robert Schildkraut , Jinhong Kim
- Applicant Address: US MA Marlborough
- Assignee: Block Engineering, LLC
- Current Assignee: Block Engineering, LLC
- Current Assignee Address: US MA Marlborough
- Agency: Houston Eliseeva LLP
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An interferometer system includes an optical bench and at least two mirror structures, being patterned from one or more layers on the optical bench and erected to extend substantially perpendicularly to the bench to define two interferometer arms to provide a Micro-Electro-Mechanical Systems (MEMS) interferometer. The MEMS interferometer is further implemented in a Fourier transform spectrometer, which includes a common housing containing the interferometer and a gas cell, possibly including a preconcentrator.
Public/Granted literature
- US20090122383A1 MEMS Michelson Interferometer and Method of Fabrication Public/Granted day:2009-05-14
Information query