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US07880890B2 MEMS michelson interferometer and method of fabrication 有权
MEMS michelson干涉仪及其制作方法

MEMS michelson interferometer and method of fabrication
Abstract:
An interferometer system includes an optical bench and at least two mirror structures, being patterned from one or more layers on the optical bench and erected to extend substantially perpendicularly to the bench to define two interferometer arms to provide a Micro-Electro-Mechanical Systems (MEMS) interferometer. The MEMS interferometer is further implemented in a Fourier transform spectrometer, which includes a common housing containing the interferometer and a gas cell, possibly including a preconcentrator.
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