Invention Grant
- Patent Title: Mirror device with an anti-stiction layer
- Patent Title (中): 具有防静电层的镜面装置
-
Application No.: US12151186Application Date: 2008-05-02
-
Publication No.: US07880952B2Publication Date: 2011-02-01
- Inventor: Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
- Applicant: Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
Public/Granted literature
- US20090231667A1 Mirror device with an anti-stiction layer Public/Granted day:2009-09-17
Information query
