Invention Grant
- Patent Title: Scanning microscope
- Patent Title (中): 扫描显微镜
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Application No.: US12420263Application Date: 2009-04-08
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Publication No.: US07881558B2Publication Date: 2011-02-01
- Inventor: Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
- Applicant: Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2005-132677 20050428
- Main IPC: G06K9/36
- IPC: G06K9/36

Abstract:
A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.
Public/Granted literature
- US20090202166A1 SCANNING MICROSCOPE Public/Granted day:2009-08-13
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