Invention Grant
- Patent Title: Primary server architectural networking arrangement and methods therefor
- Patent Title (中): 主服务器架构网络布置及其方法
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Application No.: US11610687Application Date: 2006-12-14
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Publication No.: US07882076B2Publication Date: 2011-02-01
- Inventor: Chad R. Weetman , Chung-Ho Huang
- Applicant: Chad R. Weetman , Chung-Ho Huang
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: IP Strategy Group, P.C.
- Main IPC: G06F7/00
- IPC: G06F7/00 ; G06F17/00 ; G06F12/00 ; G06F17/30 ; G06F15/173

Abstract:
An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates is provided. The arrangement includes a plurality of tools from which at least one tool of the plurality of tools has a chamber for processing at least one of the set of substrates. The arrangement also includes a plurality of secondary servers configured to collect sensor data from the plurality of tools. The arrangement further includes a primary server communicably coupled with the plurality of secondary servers and configured to execute a database management system. The sensor data is indexed using a plurality of indexing applications on the plurality of secondary servers prior to being forwarded to the primary server for use by the database management system. Indexing includes associating a sensor data item with an identity of a server where the sensor data item is stored.
Public/Granted literature
- US20080147668A1 PRIMARY SERVER ARCHITECTURAL NETWORKING ARRANGEMENT AND METHODS THEREFOR Public/Granted day:2008-06-19
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