Invention Grant
- Patent Title: Method for producing a membrane
- Patent Title (中): 膜的制造方法
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Application No.: US12378878Application Date: 2009-02-21
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Publication No.: US07882612B2Publication Date: 2011-02-08
- Inventor: Alfons Dehé , Stefan Barzen , Marc Fueldner
- Applicant: Alfons Dehé , Stefan Barzen , Marc Fueldner
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Maginot, Moore & Beck
- Priority: DE10247487 20021011
- Main IPC: H04R31/00
- IPC: H04R31/00

Abstract:
A method for producing a membrane for a device, e.g. a microphone, includes providing a substrate is provided on which a counter electrode is disposed. A sacrificial layer is provided on a surface of the counter electrode facing away from the substrate. The surface of the sacrificial layer facing away from the counter electrode is structured to form a plurality of recesses in the surface to define one or several antistick elements and one or several corrugation grooves at the same time. Subsequently, a membrane material is deposited on the structured surface of the sacrificial layer. Then, the sacrificial layer is removed to form the membrane, which has one or several corrugation grooves and one or several antistick elements.
Public/Granted literature
- US20090162534A1 Membrane and method for the production of the same Public/Granted day:2009-06-25
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