Invention Grant
US07882740B2 Sensor for detecting acceleration and angular velocity 有权
用于检测加速度和角速度的传感器

Sensor for detecting acceleration and angular velocity
Abstract:
Static and dynamic acceleration as well as static and dynamic angular velocity are detected with a simple structure. An acceleration detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoresistive elements embedded in the upper surface of the bridge portions. An angular velocity detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoelectric elements fixed to the upper surface of the bridge portions. The pedestals are fixed to a device chassis. When the weight body is displaced by acceleration, the plate-like bridge portions are deflected, so that the acceleration is detected based on the change in the electrical resistances of the piezoresistive elements. When the weight body is displaced by a Coriolis force based on angular velocity while supplying alternating signals to the piezoelectric elements to oscillate the weight body, the plate-like bridge portions are deflected, so that the angular velocity is detected based on charge generation in the piezoelectric elements.
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