Invention Grant
- Patent Title: Strain sensor and method for manufacture thereof
- Patent Title (中): 应变传感器及其制造方法
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Application No.: US11667968Application Date: 2005-12-20
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Publication No.: US07882747B2Publication Date: 2011-02-08
- Inventor: Keiichi Nakao , Yukio Mizukami , Hiroaki Ishida , Koichi Aburata
- Applicant: Keiichi Nakao , Yukio Mizukami , Hiroaki Ishida , Koichi Aburata
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2004-367163 20041220
- International Application: PCT/JP2005/023333 WO 20051220
- International Announcement: WO2006/068121 WO 20060629
- Main IPC: G01L1/00
- IPC: G01L1/00
Abstract:
The invention presents a strain sensor includes a substrate, a crystallized glass laminated on the substrate, a strain sensitive resistor laminated on the crystallized glass, in which the crystallized glass is formed by baking a plurality of types of crystallized glass powder having different thermomechanical constants. As a result, the fluctuation of sensor characteristic is decreased, and the cost is lowered.
Public/Granted literature
- US20080233370A1 Strain Sensor and Method for Manufacture Thereof Public/Granted day:2008-09-25
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