Invention Grant
US07883165B2 Droplet information measuring method and apparatus therefor, film pattern forming method, device manufacturing method, droplet discharge apparatus, electro-optical apparatus, and electronic apparatus 失效
液滴信息测量方法及其装置,薄膜​​图案形成方法,装置制造方法,液滴喷射装置,电光装置和电子装置

  • Patent Title: Droplet information measuring method and apparatus therefor, film pattern forming method, device manufacturing method, droplet discharge apparatus, electro-optical apparatus, and electronic apparatus
  • Patent Title (中): 液滴信息测量方法及其装置,薄膜​​图案形成方法,装置制造方法,液滴喷射装置,电光装置和电子装置
  • Application No.: US11490063
    Application Date: 2006-07-21
  • Publication No.: US07883165B2
    Publication Date: 2011-02-08
  • Inventor: Takashi Masuda
  • Applicant: Takashi Masuda
  • Applicant Address: JP Tokyo
  • Assignee: Seiko Epson Corporation
  • Current Assignee: Seiko Epson Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff & Berridge, PLC
  • Priority: JP2003-195826 20030711; JP2003-195827 20030711; JP2003-195829 20030711
  • Main IPC: B41J2/05
  • IPC: B41J2/05
Droplet information measuring method and apparatus therefor, film pattern forming method, device manufacturing method, droplet discharge apparatus, electro-optical apparatus, and electronic apparatus
Abstract:
A droplet information measuring method includes a preparation step of preparing a discharge head for discharging droplets, a measurement step of depositing a plurality of the droplets in series at predetermined intervals, and measuring a drying times of the plurality of droplets, and a calculation step of repeating the measurement step while varying the intervals of the plurality of droplets, and calculating a vapor diffusion distance of the droplets based upon the measurement results.
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