Invention Grant
US07883633B2 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
有权
在磁场增强等离子体反应器中形成磁场的方法
- Patent Title: Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
- Patent Title (中): 在磁场增强等离子体反应器中形成磁场的方法
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Application No.: US11612129Application Date: 2006-12-18
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Publication No.: US07883633B2Publication Date: 2011-02-08
- Inventor: Roger A. Lindley , Scott A. Hogenson , Daniel J. Hoffman
- Applicant: Roger A. Lindley , Scott A. Hogenson , Daniel J. Hoffman
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser IP Law Group
- Main IPC: C23F1/00
- IPC: C23F1/00

Abstract:
Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
Public/Granted literature
- US20070113980A1 METHOD FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PLASMA REACTOR Public/Granted day:2007-05-24
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