Invention Grant
- Patent Title: Method and apparatus for direct referencing of top surface of workpiece during imprint lithography
- Patent Title (中): 用于在压印光刻期间直接参考工件顶面的方法和装置
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Application No.: US11028798Application Date: 2005-01-04
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Publication No.: US07883832B2Publication Date: 2011-02-08
- Inventor: Matthew E. Colburn , Yves C. Martin , Theodore G. van Kessel , Hematha K. Wickramasinghe
- Applicant: Matthew E. Colburn , Yves C. Martin , Theodore G. van Kessel , Hematha K. Wickramasinghe
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: McGinn IP Law Group, PLLC
- Main IPC: G03F7/26
- IPC: G03F7/26 ; H02N1/04
Abstract:
An apparatus (and method) for referencing a surface of a workpiece during imprint lithography, includes an air bearing for mechanically referencing a surface of the workpiece, and a lithographic template coupled to the air bearing.
Public/Granted literature
- US20060145400A1 Method and apparatus for direct referencing of top surface of workpiece during imprint lithography Public/Granted day:2006-07-06
Information query
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