Invention Grant
US07883838B2 Organometallic composition for forming a metal alloy pattern and a method of forming such a pattern using the composition
有权
用于形成金属合金图案的有机金属组合物和使用该组合物形成这种图案的方法
- Patent Title: Organometallic composition for forming a metal alloy pattern and a method of forming such a pattern using the composition
- Patent Title (中): 用于形成金属合金图案的有机金属组合物和使用该组合物形成这种图案的方法
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Application No.: US10718809Application Date: 2003-11-24
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Publication No.: US07883838B2Publication Date: 2011-02-08
- Inventor: Jin Young Kim , Soon Taik Hwang , Young Hun Byun , Euk Che Hwang , Sang Yoon Lee
- Applicant: Jin Young Kim , Soon Taik Hwang , Young Hun Byun , Euk Che Hwang , Sang Yoon Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2002-0073498 20021125
- Main IPC: B01J31/12
- IPC: B01J31/12 ; C08F4/42

Abstract:
An organometallic composition containing an organometallic compound (I) containing Ag, an organometallic compound (II) containing Au, Pd, or Ru, and an organometallic compound (III) containing Ti, Ta, Cr, Mo, Ru, Ni, Pd, Cu, Au, or Al, wherein the metal components of organometallic compounds (II) and (III), respectively, are present in an amount of 0.01˜10 mol % based on the amount of Ag in the organometallic compound (I), and a method of forming a metal alloy pattern using the same. Silver alloy patterns can be obtained through a simplified manufacturing process, which patterns have enhanced heat resistance, adhesiveness and chemical stability. The method may be applied to making a reflective film for LCD and metal wiring (gate, source, drain electrode) for flexible displays or flat panel displays, and further to CMP-free damascene processing and PR-free ITO film deposition.
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