Invention Grant
- Patent Title: Method for fabricating a photonic crystal or photonic bandgap vertical-cavity surface-emitting laser
- Patent Title (中): 制造光子晶体或光子带隙垂直腔表面发射激光器的方法
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Application No.: US12302554Application Date: 2007-05-27
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Publication No.: US07883914B2Publication Date: 2011-02-08
- Inventor: Dan Birkedal , Svend Bischoff , Michael Juhl , Magnus Hald Madsen , Francis Pascal Romstad
- Applicant: Dan Birkedal , Svend Bischoff , Michael Juhl , Magnus Hald Madsen , Francis Pascal Romstad
- Applicant Address: DK Farum
- Assignee: Alight Technologies A/S
- Current Assignee: Alight Technologies A/S
- Current Assignee Address: DK Farum
- Agency: Foley & Lardner LLP
- Agent Stephen A. Bent
- Priority: DK200600728 20060529
- International Application: PCT/DK2007/050061 WO 20070527
- International Announcement: WO2007/137588 WO 20071206
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
The invention relates to fabrication of VCSELs. It provides a method for fabricating a VCSEL that contains a micro/nano-structured mode selective lateral layer, where the micro/nano-structured layer is obtained by well controlled local etching. The invention enables control of the micro/nano-structured layer thickness with very high precision. In particular, the invention relates to a method for fabricating a VCSEL with a micro/nano-structured mode selective layer for controlling the VCSELs transverse electromagnetic modes.
Public/Granted literature
- US20090203158A1 METHOD FOR FABRICATING A PHOTONIC CRYSTAL OR PHOTONIC BANDGAP VERTICAL-CAVITY SURFACE-EMITTING LASER Public/Granted day:2009-08-13
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