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US07883930B2 Phase change memory including a plurality of electrically conductive bodies, and manufacturing method thereof 有权
包括多个导电体的相变存储器及其制造方法

Phase change memory including a plurality of electrically conductive bodies, and manufacturing method thereof
Abstract:
A phase change memory including at least a storage cell which includes a first electrode, an electrically conductive portion provided on the first electrode and having at least two electrically conductive bodies with approximately the same shape provided on the first electrode, the electrically conductive bodies being spaced by a high resistance film with a high resistance, a recording layer provided on the electrically conductive portion and having phase change material which can change between a first phase state with a first specific resistance and a second phase state with a second specific resistance different from the first specific resistance, and a second electrode provided on the recording layer.
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