Invention Grant
US07883933B2 Method of making to small devices having self-assembled organic layers
有权
制造具有自组装有机层的小型器件的方法
- Patent Title: Method of making to small devices having self-assembled organic layers
- Patent Title (中): 制造具有自组装有机层的小型器件的方法
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Application No.: US12586029Application Date: 2009-09-16
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Publication No.: US07883933B2Publication Date: 2011-02-08
- Inventor: Nikolai Borisovich Zhitenev
- Applicant: Nikolai Borisovich Zhitenev
- Applicant Address: US NJ Murray Hill
- Assignee: Alcatel-Lucent USA Inc.
- Current Assignee: Alcatel-Lucent USA Inc.
- Current Assignee Address: US NJ Murray Hill
- Agent Michael J. Urbano, Esq.
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L21/335 ; H01L21/8232
Abstract:
In one embodiment of the invention, a method of fabricating a SAM device comprises the steps of: (a) providing a substrate having a top surface and a first metal electrode disposed on the top surface, (b) annealing the first metal electrode, (c) forming a SAM layer on a major surface of the first electrode, the SAM layer having a free surface such that the SAM is disposed between the free surface and the major surface of the first electrode, and (d) forming a second metal electrode on the free surface of the molecular layer. Forming step (d) includes the step of (d1) depositing the second metal electrode in at least two distinct depositions separated by an interruption period of time when essentially no deposition of the second metal takes place. SAM FETs fabricated using this method are also described.
Public/Granted literature
- US20100096623A1 Forming electrodes to small electronic devices having self-assembled organic layers Public/Granted day:2010-04-22
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