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US07883964B2 Nonvolatile semiconductor memory and a fabrication method thereof 失效
非易失性半导体存储器及其制造方法

Nonvolatile semiconductor memory and a fabrication method thereof
Abstract:
A nonvolatile semiconductor memory includes: a device region and a device isolating region, which have a pattern with a striped form that extends in a first direction, and are alternately and sequentially disposed at a first pitch in a second direction that is perpendicular to the first direction; and a contact made of a first conductive material, which is connected to the device region and disposed at the first pitch in the second direction. On a cross section of the second direction, the bottom width of the contact is longer than the top width of the contact, and the bottom width is longer than the width of the device region.
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