Invention Grant
- Patent Title: Memory device and method for manufacturing the same
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Application No.: US12549113Application Date: 2009-08-27
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Publication No.: US07883966B2Publication Date: 2011-02-08
- Inventor: Heung Jin Kim
- Applicant: Heung Jin Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2004-0118276 20041231
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A split gate (flash) EEPROM cell and a method for manufacturing the same is disclosed, in which a control gate and a floating gate are formed in a vertical structure, to minimize a size of the cell, to obtain a high coupling ratio, and to lower a programming voltage. The split gate EEPROM cell includes a semiconductor substrate having a trench; a tunneling oxide layer at sidewalls of the trench; a floating gate, a dielectric layer and a control gate in sequence on the tunneling oxide layer; a buffer dielectric layer at sidewalls of the floating gate and the control gate; a source junction in the semiconductor substrate at the bottom surface of the trench; a source electrode in the trench between opposing buffer dielectric layers, electrically connected to the source junction; and a drain junction on the surface of the semiconductor substrate outside the trench.
Public/Granted literature
- US20090317953A1 Memory Device and Method for Manufacturing the Same Public/Granted day:2009-12-24
Information query
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