Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12247068Application Date: 2008-10-07
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Publication No.: US07883978B2Publication Date: 2011-02-08
- Inventor: Sung Jin Kim
- Applicant: Sung Jin Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2007-0130937 20071214
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Disclosed are a semiconductor device and a method for manufacturing the same. The method includes forming a gate layer on a semiconductor substrate; forming a first oxide layer on the semiconductor substrate; forming a second oxide layer on the first oxide layer; exposing the first oxide layer by removing the second oxide layer other than on side surfaces of the gate layer by etching using a photoresist as a mask; and forming junctions in source/drain regions by implanting a high concentration of N-type ions and/or a high concentration of P-type ions using the second oxide layer as a sidewall mask.
Public/Granted literature
- US20090152616A1 Semiconductor Device and Method for Manufacturing the Same Public/Granted day:2009-06-18
Information query
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