Invention Grant
- Patent Title: Solid-phase sheet growing substrate and method of manufacturing solid-phase sheet
- Patent Title (中): 固相片材生长基材和固相片的制造方法
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Application No.: US12303811Application Date: 2007-05-24
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Publication No.: US07883997B2Publication Date: 2011-02-08
- Inventor: Koji Yoshida
- Applicant: Koji Yoshida
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Nixon & Vanderhye P.C.
- Priority: JP2006-167618 20060616
- International Application: PCT/JP2007/060600 WO 20070524
- International Announcement: WO2007/145063 WO 20071221
- Main IPC: C30B11/00
- IPC: C30B11/00 ; H01L21/20 ; H01L21/36 ; C23C16/24
Abstract:
A solid-phase sheet growing substrate (100) includes a main surface (1) and a side surface (2A, 2B) surrounding the main surface (1). The main surface (1) is divided by a peripheral groove (10A) into a surrounding portion (12) located at the outer side of the peripheral groove (10A) and an inner portion (11) located at the inner side of the peripheral groove (10A), and a slit groove (2) separated from the peripheral groove (10A) is formed on the side surface (2A) of the surrounding portion (12).
Public/Granted literature
- US20100159677A1 SOLID-PHASE SHEET GROWING SUBSTRATE AND METHOD OF MANUFACTURING SOLID-PHASE SHEET Public/Granted day:2010-06-24
Information query
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