Invention Grant
- Patent Title: Maskless process for suspending and thinning nanowires
- Patent Title (中): 用于悬浮和稀化纳米线的无掩模工艺
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Application No.: US12365623Application Date: 2009-02-04
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Publication No.: US07884004B2Publication Date: 2011-02-08
- Inventor: Sarunya Bangsaruntip , Guy Cohen , Jeffrey W. Sleight
- Applicant: Sarunya Bangsaruntip , Guy Cohen , Jeffrey W. Sleight
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Vazken Alexanian; Michael J. Chang, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Semiconductor-based electronic devices and techniques for fabrication thereof are provided. In one aspect, a device is provided comprising a first pad; a second pad and a plurality of nanowires connecting the first pad and the second pad in a ladder-like configuration formed in a silicon-on-insulator (SOI) layer over a buried oxide (BOX) layer, the nanowires having one or more dimensions defined by a re-distribution of silicon from the nanowires to the pads. The device can comprise a field-effect transistor (FET) having a gate surrounding the nanowires wherein portions of the nanowires surrounded by the gate form channels of the FET, the first pad and portions of the nanowires extending out from the gate adjacent to the first pad form a source region of the FET and the second pad and portions of the nanowires extending out from the gate adjacent to the second pad form a drain region of the FET.
Public/Granted literature
- US20100193770A1 Maskless Process for Suspending and Thinning Nanowires Public/Granted day:2010-08-05
Information query
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