Invention Grant
- Patent Title: Cleaning liquid for lithography and cleaning method using same
- Patent Title (中): 用于光刻的清洁液和使用其的清洁方法
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Application No.: US12224300Application Date: 2007-02-14
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Publication No.: US07884062B2Publication Date: 2011-02-08
- Inventor: Jun Koshiyama , Hideya Kobari
- Applicant: Jun Koshiyama , Hideya Kobari
- Applicant Address: JP Kanagawa
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2006-047002 20060223; JP2006-082093 20060324
- International Application: PCT/JP2007/052624 WO 20070214
- International Announcement: WO2007/097233 WO 20070830
- Main IPC: C11D7/50
- IPC: C11D7/50

Abstract:
Disclosed is a cleaning liquid for lithography which is characterized by containing a mixed organic solvent which is obtained by mixing (A) at least one solvent selected from ketone organic solvents and glycol ether organic solvents, (B) at least one solvent selected from lactone organic solvents and (C) at least one solvent selected from alkoxy benzenes and aromatic alcohols. This cleaning liquid is highly safe and does not have adverse effects on the environment or the human body, while having basic characteristics necessary for a cleaning liquid for lithography. In addition, this cleaning liquid can be stably supplied at low cost.
Public/Granted literature
- US20090029893A1 Cleaning Liquid For Lithography and Cleaning Method Using Same Public/Granted day:2009-01-29
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