Invention Grant
- Patent Title: Atom probes, atom probe specimens, and associated methods
- Patent Title (中): 原子探针,原子探针标本和相关方法
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Application No.: US12064020Application Date: 2006-08-15
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Publication No.: US07884323B2Publication Date: 2011-02-08
- Inventor: Thomas F. Kelly , Joseph H. Bunton , Scott A. Wiener
- Applicant: Thomas F. Kelly , Joseph H. Bunton , Scott A. Wiener
- Applicant Address: US NJ Mahwah
- Assignee: Cameca Instruments, Inc.
- Current Assignee: Cameca Instruments, Inc.
- Current Assignee Address: US NJ Mahwah
- Agency: DeWitt Ross & Stevens S.C.
- Agent Craig A. Fieschko, Esq.
- International Application: PCT/US2006/031982 WO 20060815
- International Announcement: WO2007/022265 WO 20070222
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
Public/Granted literature
- US20080308728A1 Atom Probes, Atom Probe Specimens, and Associated Methods Public/Granted day:2008-12-18
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