Invention Grant
US07884422B2 Semiconductor memory and method for manufacturing a semiconductor memory
有权
半导体存储器和半导体存储器的制造方法
- Patent Title: Semiconductor memory and method for manufacturing a semiconductor memory
- Patent Title (中): 半导体存储器和半导体存储器的制造方法
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Application No.: US11841257Application Date: 2007-08-20
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Publication No.: US07884422B2Publication Date: 2011-02-08
- Inventor: Makoto Mizukami , Riichiro Shirota , Fumitaka Arai
- Applicant: Makoto Mizukami , Riichiro Shirota , Fumitaka Arai
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPP2006-226741 20060823
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
A semiconductor memory including a plurality of cell units arranged in a row direction, each of the cell units includes: a semiconductor region; a first buried insulating film provided on the semiconductor region; a second buried insulating film provided on the first buried insulating film, which has higher dielectric constant than the first buried insulating film; a semiconductor layer provided on the second buried insulating film; and a plurality of memory cell transistors arranged in a column direction, each of the memory cell transistors having a source region, a drain region and a channel region defined in the semiconductor layer.
Public/Granted literature
- US20080073695A1 SEMICONDUCTOR MEMORY AND METHOD FOR MANUFACTURING A SEMICONDUCTOR MEMORY Public/Granted day:2008-03-27
Information query
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