Invention Grant
- Patent Title: Piezoelectric thin-film resonator and filter using the same
- Patent Title (中): 压电薄膜谐振器和使用其的滤波器
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Application No.: US11259347Application Date: 2005-10-27
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Publication No.: US07884527B2Publication Date: 2011-02-08
- Inventor: Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
- Applicant: Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
- Applicant Address: JP Tokyo
- Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Arent Fox LLP
- Priority: JP2004-313727 20041028
- Main IPC: H01L41/047
- IPC: H01L41/047
Abstract:
A piezoelectric thin-film resonator includes: a substrate; a lower electrode that is formed on the substrate; a piezoelectric film that is formed on the lower electrode and the substrate; and an upper electrode that is formed on the piezoelectric film, with the piezoelectric film being partially interposed between the lower electrode and the upper electrode facing each other. In this piezoelectric thin-film resonator, at least a part of the outer periphery of the piezoelectric film interposed between the lower electrode and the upper electrode overlaps the outer periphery of the region formed by the upper electrode and the lower electrode facing each other.
Public/Granted literature
- US20060091764A1 Piezoelectric thin-film resonator and filter using the same Public/Granted day:2006-05-04
Information query
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