Invention Grant
US07884622B2 Method of adjusting moving position of transfer arm and position detecting jig
有权
调整传送臂和位置检测夹具移动位置的方法
- Patent Title: Method of adjusting moving position of transfer arm and position detecting jig
- Patent Title (中): 调整传送臂和位置检测夹具移动位置的方法
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Application No.: US12192405Application Date: 2008-08-15
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Publication No.: US07884622B2Publication Date: 2011-02-08
- Inventor: Yuichi Doki , Koji Mahara , Tokutarou Hayashi
- Applicant: Yuichi Doki , Koji Mahara , Tokutarou Hayashi
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-217820 20070824
- Main IPC: G01R27/26
- IPC: G01R27/26
Abstract:
In the present invention, a position detecting substrate having a capacitive sensor is supported on a transfer arm and transferred by the transfer arm and mounted on a mounting part. The capacitive sensor on the position detecting substrate then detects a position of a target object on the mounting part to detect a mounting position of the position detecting substrate on the mounting part. Based on the mounting position of the position detecting substrate, the moving position of the transfer arm when transferring a substrate is then adjusted.
Public/Granted literature
- US20090051370A1 METHOD OF ADJUSTING MOVING POSITION OF TRANSFER ARM AND POSITION DETECTING JIG Public/Granted day:2009-02-26
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