Invention Grant
- Patent Title: Six degree of freedom (DOF) actuator reaction mass
- Patent Title (中): 六自由度(DOF)执行器反应质量
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Application No.: US12057130Application Date: 2008-03-27
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Publication No.: US07885021B2Publication Date: 2011-02-08
- Inventor: Frans H. van Deuren , Hendrick Dirk Visser , Bernard Stommen , Jeroen van Aert , Aart Johannes Mateboer
- Applicant: Frans H. van Deuren , Hendrick Dirk Visser , Bernard Stommen , Jeroen van Aert , Aart Johannes Mateboer
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B7/02
- IPC: G02B7/02

Abstract:
In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF.
Public/Granted literature
- US20090040638A1 SIX DEGREE OF FREEDOM (DOF) ACTUATOR REACTION MASS Public/Granted day:2009-02-12
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |