Invention Grant
- Patent Title: Fluid flow measuring and proportional fluid flow control device
- Patent Title (中): 流体流量测量和比例流体流量控制装置
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Application No.: US12253732Application Date: 2008-10-17
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Publication No.: US07885773B2Publication Date: 2011-02-08
- Inventor: Christopher Wargo , J. Karl Niermeyer , Jieh-Hwa Shyu , Craig L. Brodeur , William Basser
- Applicant: Christopher Wargo , J. Karl Niermeyer , Jieh-Hwa Shyu , Craig L. Brodeur , William Basser
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Sprinkle IP Law Group
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.
Public/Granted literature
- US20090113985A1 FLUID FLOW MEASURING AND PROPORTIONAL FLUID FLOW CONTROL DEVICE Public/Granted day:2009-05-07
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