Invention Grant
- Patent Title: Flexure guide bearing for short stroke stage
- Patent Title (中): 挠性导轨轴承短行程
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Application No.: US12394966Application Date: 2009-02-27
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Publication No.: US07886449B2Publication Date: 2011-02-15
- Inventor: Mark T. Kosmowski
- Applicant: Mark T. Kosmowski
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Young Basile
- Main IPC: G01B11/27
- IPC: G01B11/27 ; G01B7/02

Abstract:
A laser processing system in which a laser beam propagates along a beam axis and through a lens for incidence on a work surface of a target specimen mounted on a support. The lens forms a focal region of the laser beam. The support is operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface. An assembly includes at least one flexure that supports the lens and guides movement of the lens along the beam axis in response to a motive force to adjust the focal region of the laser beam relative to the work surface.
Public/Granted literature
- US20090161238A1 FLEXURE GUIDE BEARING FOR SHORT STROKE STAGE Public/Granted day:2009-06-25
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