Invention Grant
- Patent Title: Inertial sensor
- Patent Title (中): 惯性传感器
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Application No.: US11878883Application Date: 2007-07-27
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Publication No.: US07886596B2Publication Date: 2011-02-15
- Inventor: Masayuki Matsunaga , Kenji Sato
- Applicant: Masayuki Matsunaga , Kenji Sato
- Applicant Address: JP Tokyo
- Assignee: Epson Toyocom Corporation
- Current Assignee: Epson Toyocom Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-216505 20060809; JP2006-249404 20060914; JP2007-119281 20070427
- Main IPC: G01P9/04
- IPC: G01P9/04

Abstract:
An inertial sensor, comprises a detection element detecting an amount of a physical quantity in a detection axis direction, a plurality of support members having flexibility and supporting nearly a center of the detection element, and a package substrate housing the detection element and the plurality of support members. In a case when an X-axis is defined as an extending direction of the plurality of support members, a Y-axis is perpendicular to the X-axis in a plane including the detection element, and a Z-axis is perpendicular to the X-axis and the Y-axis, one of load components in a direction of the Y-axis of the detection member applied to the plurality of support members is nearly equal to other among the plurality of support members, and one of load components in a direction of the Z-axis is nearly equal to the other among the plurality of support members.
Public/Granted literature
- US20080034865A1 Inertial sensor, inertial sensor device and manufacturing method the same Public/Granted day:2008-02-14
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