Invention Grant
- Patent Title: Dynamic amount sensor
- Patent Title (中): 动态量传感器
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Application No.: US11703017Application Date: 2007-02-06
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Publication No.: US07886597B2Publication Date: 2011-02-15
- Inventor: Takeshi Uchiyama , Mitsuo Yarita , Akira Egawa
- Applicant: Takeshi Uchiyama , Mitsuo Yarita , Akira Egawa
- Applicant Address: JP
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2006-037043 20060214; JP2006-355666 20061228
- Main IPC: G01P9/04
- IPC: G01P9/04 ; G01P15/125

Abstract:
A dynamic amount sensor has a detecting circuit that detects a change in an electrostatic capacitance of each of electrostatic capacitance elements comprised of a movable electrode and a fixed electrode. A switching circuit switches the detecting circuit to first and second connecting states that detect changes in the electrostatic capacitance of the electrostatic capacitance elements in accordance with a change in an attitude of the movable electrode in corresponding first and second detecting axes directions. In the first and second connecting states, the detecting circuit includes circuits formed by connecting the electrostatic capacitance elements in series which change electrostatic capacitances symmetrically along with inclination of the movable electrode in the corresponding first and second detecting axes directions. A carrier wave applying circuit applies carrier waves whose phases are inverted from each other by 180° to the electrostatic capacitance elements which are connected in series in the first and second connecting states of the detecting circuit.
Public/Granted literature
- US20070240509A1 Dynamic amount sensor Public/Granted day:2007-10-18
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