Invention Grant
US07886770B2 MSM component and associated gas panel assembly 有权
MSM组件和相关的气体面板组件

MSM component and associated gas panel assembly
Abstract:
A gas panel assembly having at least one U-shaped MSM interconnection component is disclosed where the interconnection component straddles at least a pair of adjacent modular inserts and is fastened to planar support plate such that the fluidic inserts are held immobile.
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