Invention Grant
US07887305B2 Flexible tank and a chemical liquid supply apparatus using the same
有权
柔性罐和使用其的化学液体供给装置
- Patent Title: Flexible tank and a chemical liquid supply apparatus using the same
- Patent Title (中): 柔性罐和使用其的化学液体供给装置
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Application No.: US11113608Application Date: 2005-04-25
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Publication No.: US07887305B2Publication Date: 2011-02-15
- Inventor: Takeo Yajima
- Applicant: Takeo Yajima
- Applicant Address: JP Tokyo
- Assignee: Koganei Corporation
- Current Assignee: Koganei Corporation
- Current Assignee Address: JP Tokyo
- Agency: McCormick, Paulding & Huber LLP
- Priority: JP2004-130160 20040426
- Main IPC: F04B23/04
- IPC: F04B23/04 ; F04B11/00

Abstract:
A flexible tank has a volume-variable chamber formed so as to be sectioned by a flexible tube that is expanded or contracted in accordance with the amount of the contained chemical liquid, and adaptor parts attached to the flexible tube. A primary-side port open to the volume-variable chamber is open into one of the adaptor parts, and a secondary-side port open to the volume-variable chamber is open into the other adaptor part. The contact between the chemical liquid and air in the volume-variable chamber is suppressed to minimum level, thereby containing the chemical liquid without deteriorating the cleanliness of the chemical liquid, and improving discharge accuracy of the chemical liquid.
Public/Granted literature
- US20050238504A1 Flexible tank and a chemical liquid supply apparatus using the same Public/Granted day:2005-10-27
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