Invention Grant
- Patent Title: Printing head for nano patterning
- Patent Title (中): 纳米图案印刷头
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Application No.: US11417114Application Date: 2006-05-04
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Publication No.: US07887635B2Publication Date: 2011-02-15
- Inventor: Dong-Soo Kim , Won-Hee Lee , Taek-Min Lee , Doo-Sun Choi , Byung-Oh Choi
- Applicant: Dong-Soo Kim , Won-Hee Lee , Taek-Min Lee , Doo-Sun Choi , Byung-Oh Choi
- Applicant Address: KR Taejon
- Assignee: Korea Institute of Machinery & Materials
- Current Assignee: Korea Institute of Machinery & Materials
- Current Assignee Address: KR Taejon
- Agency: Holme Roberts & Owen LLP
- Priority: KR10-2003-0078338 20031106; WOPCT/KR2004/000687 20040326
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306

Abstract:
The present invention provides a printing head for nano patterning including a manifold for accommodating a liquid printing material, a cartridge with an injection chamber communicating with the manifold, and a sample holder for patterning installed outside the injection chamber of the cartridge. The printing head comprises a shadow mask which is installed outside the injection chamber to be finely moved in an X-Y direction and has a single injection hole with a relatively very small size; an actuator for finely moving the shadow mask; an injection-inducing unit including a high voltage generator, a power supply electrode that is installed within the injection chamber and receives power from the high voltage generator to generate positive charges, and an opposite electrode for generating negative charges on the sample holder in a state where the shadow mask is interposed between the power supply electrode and the opposite electrode, thereby generating induced discharge from the injection chamber toward the sample holder; and a control unit for controlling the driving of the actuator so that the injection hole of the shadow mask can be moved to patterning positions corresponding to patterning data input in advance. According to the present invention, patterning accuracy can be improved, ultra-fine patterning and patterning of arbitrary shapes can be achieved, and a configuration for injecting the printing material can be simplified.
Public/Granted literature
- US20060201355A1 Printing head for nano patterning Public/Granted day:2006-09-14
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