Invention Grant
US07887710B2 Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof 有权
透明导电膜的构图方法,使用其的薄膜晶体管基板及其制造方法

Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof
Abstract:
A method of patterning a transparent conductive film adaptive for selectively etching a transparent conductive film without any mask processes, a thin film transistor for a display device using the same and a fabricating method thereof are disclosed. In the method of patterning the transparent conductive film, an inorganic material substrate is prepared. An organic material pattern is formed at a desired area of the inorganic material substrate. A thin film having a different crystallization rate depending upon said inorganic material and said organic material is formed. The thin film is selectively etched in accordance with said crystallization rate.
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