Invention Grant
US07887878B2 Method of manufacturing a fine-patternable, carbon nano-tube emitter with high reliabilty
有权
制造具有高可靠性的精细图案化的碳纳米管发射体的方法
- Patent Title: Method of manufacturing a fine-patternable, carbon nano-tube emitter with high reliabilty
- Patent Title (中): 制造具有高可靠性的精细图案化的碳纳米管发射体的方法
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Application No.: US11944149Application Date: 2007-11-21
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Publication No.: US07887878B2Publication Date: 2011-02-15
- Inventor: Dae Jun Kim , Yoon Ho Song , Jin Woo Jeong
- Applicant: Dae Jun Kim , Yoon Ho Song , Jin Woo Jeong
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2006-0123944 20061207
- Main IPC: B05D5/12
- IPC: B05D5/12

Abstract:
A method of manufacturing a carbon nano-tube (CNT) emitter includes the steps of: (a) dispersing a CNT powder, an organic binder, a photosensitive material, a monomer, and a nano-sized metal particle in a solvent to manufacture a CNT paste; (b) coating the CNT paste onto an electrode formed over a substrate; (c) exposing the CNT paste coated on the electrode to thereby perform fine-patterning; (d) plasticizing the finely patterned CNT paste; and (e) processing a surface of the CNT paste such that the surface of the plasticized CNT paste is activated, wherein step (d) includes a first plasticizing step performed in an air atmosphere; and a second plasticizing step performed in a vacuum or inactive gas atmosphere. Improved uniformity of electron emissions in a field emission device is achieved and a plurality of CNT emitter regions are formed within a single pixel.
Public/Granted literature
- US20080139073A1 METHOD OF MANUFACTURING FINE PATTERNABLE CARBON NANO-TUBE EMITTER WITH HIGH RELIABILITY Public/Granted day:2008-06-12
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