Invention Grant
- Patent Title: Nanolithography methods and products therefor and produced thereby
- Patent Title (中): 纳米光刻方法和产品,由此生产
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Application No.: US10381893Application Date: 2001-10-19
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Publication No.: US07887885B2Publication Date: 2011-02-15
- Inventor: Chad A. Mirkin , Peter V. Schwartz , James J. Storhoff , So-Jung Park
- Applicant: Chad A. Mirkin , Peter V. Schwartz , James J. Storhoff , So-Jung Park
- Applicant Address: US IL Evanston
- Assignee: Northwestern University
- Current Assignee: Northwestern University
- Current Assignee Address: US IL Evanston
- Agency: Sheridan Ross, P.C.
- International Application: PCT/US01/50958 WO 20011019
- International Announcement: WO02/45215 WO 20020606
- Main IPC: B05D3/12
- IPC: B05D3/12

Abstract:
The invention provides methods of nanolithography and products therefor and produced thereby. In particular, the invention provides a nanolithographic method referred to as high force nanografting (HFN). HFN utilizes a tip (e.g., a scanning probe microscope (SPM) tip such as an atomic force microscope (AFM) tip) to pattern a substrate passivated with a resist. In the presence of a patterning compound, the tip is used to apply a high force to the substrate to remove molecules of the resist from the substrate, whereupon molecules of the patterning compound are able to attach to the substrate the form the desired pattern.
Public/Granted literature
- US20040131843A1 Nanolithography methods and products therefor and produced thereby Public/Granted day:2004-07-08
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