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US07887889B2 Plasma fluorination treatment of porous materials 有权
多孔材料的等离子体氟化处理

Plasma fluorination treatment of porous materials
Abstract:
The application discloses articles and methods of plasma fluorination treatment that employ a capacitively-coupled system to fluorinate porous articles. The methods include placing the article to be treated within an ion sheath adjacent to an electrode and placing the article to be treated between powered and grounded electrodes separated by about 25 mm or less.
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