Invention Grant
US07887919B2 Amorphous-carbon-based hard multilayer film and hard surface member having the film on surface
有权
无定形碳基硬质多层膜和表面具有该膜的硬质表面构件
- Patent Title: Amorphous-carbon-based hard multilayer film and hard surface member having the film on surface
- Patent Title (中): 无定形碳基硬质多层膜和表面具有该膜的硬质表面构件
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Application No.: US11670161Application Date: 2007-02-01
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Publication No.: US07887919B2Publication Date: 2011-02-15
- Inventor: Kenji Yamamoto , Katsuhiro Matsukado
- Applicant: Kenji Yamamoto , Katsuhiro Matsukado
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-123668 20060427
- Main IPC: B32B9/00
- IPC: B32B9/00

Abstract:
An amorphous carbon (DLC) film having excellent adhesion at high temperature is provided. An amorphous-carbon-based hard multilayer film, which is formed on a surface of a substrate, includes a base layer formed at a substrate side, a surface layer formed at a surface side, and a compositional gradient layer formed between the base layer and the surface layer, wherein the base layer includes a nitride or a carbo-nitride of an element M expressed by the following formula (1), the surface layer includes an amorphous carbon film containing C of 50 atomic percent or more, and the compositional gradient layer is a layer in which the element M and nitrogen are decreased, and carbon is increased from the base layer to the amorphous carbon film: M1-x-yCxNy (1), (wherein M is at least one selected from a group 4A element in the periodic table, a group 5A element, a group 6A element, Al, and Si, and x and y denote atomic ratios in the formula, and x is 0.5 or less, y is 0.03 or more, and 1-x-y is more then 0).
Public/Granted literature
- US20070254187A1 AMORPHOUS-CARBON-BASED HARD MULTILAYER FILM AND HARD SURFACE MEMBER HAVING THE FILM ON SURFACE Public/Granted day:2007-11-01
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