Invention Grant
US07887988B2 Positive resist composition and pattern forming method using the same
有权
正型抗蚀剂组合物和使用其的图案形成方法
- Patent Title: Positive resist composition and pattern forming method using the same
- Patent Title (中): 正型抗蚀剂组合物和使用其的图案形成方法
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Application No.: US11717645Application Date: 2007-03-14
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Publication No.: US07887988B2Publication Date: 2011-02-15
- Inventor: Kazuyoshi Mizutani , Kaoru Iwato , Kunihiko Kodama , Masaomi Makino
- Applicant: Kazuyoshi Mizutani , Kaoru Iwato , Kunihiko Kodama , Masaomi Makino
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPP2006-069383 20060314
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30

Abstract:
A resist composition, which comprises: (A) a resin containing a repeating unit represented by formula (I); and (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation: wherein AR represents a benzene ring or a naphthalene ring; R represents a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group; Z represents a linking group for forming a ring together with AR; and A represents an atom or group selected from the group consisting of a hydrogen atom, an alkyl group, a halogen atom, a cyano group and an alkyloxycarbonyl group, and a pattern forming method using the resist composition.
Public/Granted literature
- US20070218407A1 Positive resist composition and pattern forming method using the same Public/Granted day:2007-09-20
Information query
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