Invention Grant
US07887990B2 Fluorine-containing compound, fluorine-containing polymer, postive-type resist composition, and patterning process using same
有权
含氟化合物,含氟聚合物,后置型抗蚀剂组合物和使用它们的图案化工艺
- Patent Title: Fluorine-containing compound, fluorine-containing polymer, postive-type resist composition, and patterning process using same
- Patent Title (中): 含氟化合物,含氟聚合物,后置型抗蚀剂组合物和使用它们的图案化工艺
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Application No.: US12137145Application Date: 2008-06-11
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Publication No.: US07887990B2Publication Date: 2011-02-15
- Inventor: Yoshimi Isono , Jonathan Joachim Jodry , Satoru Narizuka
- Applicant: Yoshimi Isono , Jonathan Joachim Jodry , Satoru Narizuka
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2007-155165 20070612
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30 ; C08F20/22

Abstract:
Disclosed is a fluorine-containing compound represented by formula (1), wherein R1 represents a polymerizable double-bond containing group, R2 represents an acid-labile protecting group, R3 represents a fluorine atom or fluorine-containing alkyl group, and W represents a bivalent linking group. This compound can provide a fluorine-containing polymer compound that has a weight-average molecular weight of 1,000-1,000,000 and contains a repeating unit represented by formula (2), wherein R2, R3 and W are defined as above, each of R4, R5 and R6 independently represents a hydrogen atom, fluorine atom or monovalent organic group, at least two of R4, R5 and R6 may be combined to form a ring. This polymer compound can provide a resist composition capable of forming a pattern that is transparent to exposure light and superior in rectangularity.
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