Invention Grant
- Patent Title: Reducing coherent crosstalk in dual-beam laser processing system
- Patent Title (中): 减少双光束激光加工系统的相干串扰
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Application No.: US11496871Application Date: 2006-07-31
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Publication No.: US07888620B2Publication Date: 2011-02-15
- Inventor: Douglas Earl Holmgren , Ho Wai Lo , Philip Mitchell Conklin
- Applicant: Douglas Earl Holmgren , Ho Wai Lo , Philip Mitchell Conklin
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Stoel Rives LLP
- Main IPC: B23K26/00
- IPC: B23K26/00 ; G01B11/02

Abstract:
A method of and system for forming two laser processing beams with controlled stability at a target specimen work surface includes first and second mutually coherent laser beams propagating along separate first and second beam paths that are combined to perform an optical property adjustment. The combined laser beams are separated into third and fourth laser beams propagating along separate beam paths and including respective third and fourth main beam components, and one of the third and fourth laser beams contributes a leakage component that copropagates in mutual temporal coherence with the main beam component of the other of the third and fourth laser beams. An effect of mutual temporal coherence of the leakage component and the other main beam component with which the leakage component copropagates is reduced through acousto-optic modulation frequency shifts or through incorporation of an optical path length difference in the two beams.
Public/Granted literature
- US20080023447A1 Reducing coherent crosstalk in dual-beam laser processing system Public/Granted day:2008-01-31
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