Invention Grant
US07888643B2 Focusing and positioning device for a particle-optical raster microscope 有权
聚焦定位装置用于粒子光栅显微镜

  • Patent Title: Focusing and positioning device for a particle-optical raster microscope
  • Patent Title (中): 聚焦定位装置用于粒子光栅显微镜
  • Application No.: US12222087
    Application Date: 2008-08-01
  • Publication No.: US07888643B2
    Publication Date: 2011-02-15
  • Inventor: Michael Albiez
  • Applicant: Michael Albiez
  • Applicant Address: DE Oberkochen
  • Assignee: Carl Zeiss NTS GmbH
  • Current Assignee: Carl Zeiss NTS GmbH
  • Current Assignee Address: DE Oberkochen
  • Agent Walter Ottesen
  • Priority: DE102006004950 20060203
  • Main IPC: G01N23/00
  • IPC: G01N23/00
Focusing and positioning device for a particle-optical raster microscope
Abstract:
The invention relates to a focusing and positioning ancillary device for a particle-optical scanning microscope, a particle-optical scanning microscope including a corresponding positioning aid, and a method for focusing and positioning an object in a particle-optical scanning microscope. The focusing and positioning ancillary device includes an illuminating device, a camera, a display and a control unit. The illuminating device produces a collimated or focused light beam at an angle to the particle-optical beam axis which intersects the particle-optical beam axis at a predetermined position. The camera is sensitive to the wavelength of the light beam and records an image of the object, which is positioned on the object table, at a second angle to the particle-optical beam axis. The control unit produces an image captured by the camera on the display together with a marking which indicates the position of the particle-optical beam axis in the image.
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