Invention Grant
- Patent Title: Phase change memory device
- Patent Title (中): 相变存储器件
-
Application No.: US12008125Application Date: 2008-01-09
-
Publication No.: US07888667B2Publication Date: 2011-02-15
- Inventor: Yoon-Jong Song , Se-Ho Lee , Ki-Nam Kim , Su-Youn Lee , Jae-Hyun Park
- Applicant: Yoon-Jong Song , Se-Ho Lee , Ki-Nam Kim , Su-Youn Lee , Jae-Hyun Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP
- Priority: KR2004-56000 20040719
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L21/00 ; G11C11/00

Abstract:
A phase change memory device includes a mold layer disposed on a substrate, a heating electrode, a filling insulation pattern and a phase change material pattern. The heating electrode is disposed in an opening exposing the substrate through the mold layer. The heating electrode is formed in a substantially cylindrical shape, having its sidewalls conformally disposed on the lower inner walls of the opening. The filling insulation pattern fills an empty region surrounded by the sidewalls of the heating electrode. The phase change material pattern is disposed on the mold layer and downwardly extended to fill the empty part of the opening. The phase change material pattern contacts the top surfaces of the sidewalls of the heating electrode.
Public/Granted literature
- US20080173862A1 Phase change memory device and method for forming the same Public/Granted day:2008-07-24
Information query
IPC分类: