Invention Grant
US07888705B2 Methods for defining dynamic array section with manufacturing assurance halo and apparatus implementing the same
有权
用于定义具有制造保证光环的动态阵列部分的方法和实现相同的装置的方法
- Patent Title: Methods for defining dynamic array section with manufacturing assurance halo and apparatus implementing the same
- Patent Title (中): 用于定义具有制造保证光环的动态阵列部分的方法和实现相同的装置的方法
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Application No.: US12013366Application Date: 2008-01-11
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Publication No.: US07888705B2Publication Date: 2011-02-15
- Inventor: Scott T. Becker , Michael C. Smayling
- Applicant: Scott T. Becker , Michael C. Smayling
- Applicant Address: US CA Los Gatos
- Assignee: Tela Innovations, Inc.
- Current Assignee: Tela Innovations, Inc.
- Current Assignee Address: US CA Los Gatos
- Agency: Martine Penilla & Gencarella, LLP
- Main IPC: H01L21/82
- IPC: H01L21/82 ; G06F9/45
Abstract:
A method is disclosed for defining a dynamic array section to be manufactured on a semiconductor chip. The method includes defining a peripheral boundary of the dynamic array section. The method also includes defining a manufacturing assurance halo outside the boundary of the dynamic array section. The method further includes controlling chip layout features within the manufacturing assurance halo to ensure that manufacturing of conductive features inside the boundary of the dynamic array section is not adversely affected by chip layout features within the manufacturing assurance halo.
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Information query
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